发明名称 Method for structuring a layer onto a substrate
摘要 <p>The method involves providing an arrangement with a substrate (1) and a polymer layer (2) made of polymer and additive, and covering selected areas of the layer by a radiation mask (3). The arrangement is charged with ultraviolet radiation, where dosage of the radiation is selected, such that the radiation modifies a surface-near layer (21) and the mask. The mask is removed from the arrangement. The arrangement is treated with a solvent, which does not dissolve the substrate. The part of the layer is partially dissolved by the solvent, which is used as a flushing medium.</p>
申请公布号 EP1959298(A2) 申请公布日期 2008.08.20
申请号 EP20080002496 申请日期 2008.02.12
申请人 KARLSRUHER INSTITUT FUER TECHNOLOGIE 发明人 SCHIMMEL, THOMAS PROF. DR.;PANCERA-MONTERO, SABRINA DR.;GLIEMANN, HARTMUT DR.
分类号 G03F7/00;B01L3/00 主分类号 G03F7/00
代理机构 代理人
主权项
地址