METHOD FOR PROCESSING SUBSTRATE, CATALYST PROCESS LIQUID, AND SUBSTRATE PROCESSING APPARATUS,申请号EP20050704220-传众专利搜索

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发明名称	METHOD FOR PROCESSING SUBSTRATE, CATALYST PROCESS LIQUID, AND SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	EP1717344(A4)	申请公布日期	2008.08.20
申请号	EP20050704220	申请日期	2005.01.21
申请人	EBARA CORPORATION	发明人	WANG, XINMING;TAKAGI DAISUKE;TASHIRO, AKIHIKO;FUKUNAGA, YUKIO;FUKUNAGA, AKIRA;OWATARI, AKIRA;NISHIOKA, YUKIKO;SAHODA, TSUYOSHI
分类号	C23C18/18;C23C18/16;H01L21/00;H01L21/02;H01L21/28;H01L21/288;H01L21/306;H01L21/3205;H01L21/321;H01L21/768	主分类号	C23C18/18
代理机构		代理人
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