| 摘要 |
A thin film transistor substrate inspecting apparatus is provided to stably inspect a thin film transistor substrate by preventing a thin film transistor from being damaged due to foreign material of a modulator. A thin film transistor substrate inspecting apparatus(100) includes a stage(150), a probe(160), a modulator(120), a transfer unit(140), and a modulator inspection unit(180). The stage is a place where a thin film transistor substrate(S) is installed. The probe applies a test driving signal by being connected to the thin film transistor substrate rested on the stage. The modulator inspects whether a thin film transistor formed on the thin film transistor substrate is defective. The transfer unit transfers the modulator in a direction parallel to the surface of the thin film transistor substrate. The modulator inspection unit inspects a state of the modulator. |
