FLUID ACTUATOR, HEAT GENERATING DEVICE USING THE SAME, AND ANALYSIS DEVICE

摘要

A fluid actuator includes a piezoelectric body (31), a fluid channel (2) having the piezoelectric body (31) on a part of the inner wall thereof and enabling a fluid to move inside, and a surface acoustic wave generation portion (101) for driving the fluid in the fluid channel by surface acoustic waves generated from a interdigital electrode formed on the surface of the piezoelectric body (31) facing the fluid channel (2). The surface acoustic wave generation portion (101) is arranged at the position offset from the center of the fluid channel (2). The fluid actuator can perform drive with a low voltage and drives the fluid in a narrow fluid channel in a single direction.