| 摘要 |
<p>The present invention relates to a heterocycle-containing iodonium salt useful as, for example, a cationic photopolymerization initiator and an acid generator for a chemically amplified resist, shown by the general formula [35]:
[wherein R26 and R27 are each independently an aryl group which may have a halogen atom or a lower alkyl group as a substituent, a group shown by the above-mentioned general formula [2]:
, or a group shown by the general formula [3]:
; A3 is a halogen atom or an anion derived from an inorganic strong acid, an organic acid or a compound shown by the general formula [4]:
HM1(R7)4 [4]
(wherein M1 is a boron atom or a gallium atom; and R7 is an aryl group); and provided that at least one of R26 and R27. is a group shown by the above-mentioned general formula [2] or [3], and when only one of R26 and R27 is a group shown by the above-mentioned general formula [2] or [3], A3 is an anion derived from an inorganic strong acid shown by the general formula [36];
HM3F6 [36]
(wherein M3 is a phosphorus atom, an arsenic atom or an antimony atom), an organic acid or a compound shown by the general formula [4])]
</p> |
