发明名称 AGITATION-TYPE WET PROCESS MECHINE
摘要 An agitation-type wet process machine is provided to improve processing efficiency of chemicals by installing a nozzle with a large angle, lower pressure, and large capacitance above rollers selectively. An agitation-type wet process machine comprises a moving unit and a plurality of nozzles(220). The moving unit has a plurality of rollers(216) with blades(218). The rollers are installed above and under a moving path of the moving unit to convey a workpiece(212) and agitate chemicals(230). The nozzles are installed above or under the moving path and inject the chemical to the workpiece. The blades are separated from the surface of the workpiece. The nozzles are located between the rollers.
申请公布号 KR20080076455(A) 申请公布日期 2008.08.20
申请号 KR20070016400 申请日期 2007.02.16
申请人 UNITED BENEFIT INC. 发明人 CHANG SHIH CHANG
分类号 H01L21/3063 主分类号 H01L21/3063
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