| 摘要 |
<p>To enable electrical connection to be reliably established between a substrate and a space transformer and facilitate the maintenance as well as to reduce the cost. A probe card includes a plurality of probes that come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that houses and holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that is mounted on the substrate and reinforces the substrate; an interposer that includes a housing and is stacked on the substrate for connection of wires of the substrate, the housing having formed therein a plurality of connection terminals resilient in an axial direction thereof and a plurality of hole portions each housing one of the connection terminals; and a space transformer that is interposed and stacked between the interposer and the probe head and transforms intervals among the wires to be connected through the interposer, the wires coming out on a surface of the space transformer facing the probe head.</p> |
