PROBE CARD

摘要

To improve accuracy of the flatness and parallelism regardless whether a substrate having a wiring pattern has been deformed. To achieve the object, a probe card includes a plurality of probes that are made of a conductive material and come into contact with the semiconductor wafer to receive or output an electric signal; a probe head that houses and holds the probes; a substrate that has a wiring pattern corresponding to the circuit structure for generating a signal for a test; a reinforcing member that is mounted on the substrate and reinforces the substrate; an interposer that is stacked on the substrate for connection of wires of the substrate; a space transformer that is interposed and stacked between the interposer and the probe head and transforms intervals among the wires to be connected through the interposer, the wires coming out on a surface of the space transformer facing the probe head; and a plurality of first post members that have a height greater than a thickness of the substrate, and are embedded in the substrate from a portion of the substrate on which the interposer is stacked to penetrate through the substrate.