Phase shifting element and particle beam device with phase shifting element

摘要

The phase shifting element (1) has a unit (2) for generating an inhomogeneous or anisotropic potential. An opening is formed in the perpendicular direction in rotationally non-symmetric manner to a plane of the phase shifting element. The unit is formed for the production of an inhomogeneous potential for the production of an electric or magnetic potential. The phase shifting element has multiple openings. An independent claim is also included for the particle beam unit with an object lens.