发明名称 |
EXPOSURE APPARATUS USING SCANNER |
摘要 |
An exposure apparatus using a scanner is provided to simplify the exposure apparatus by using only one UV light source, thereby reducing the manufacturing cost. An exposure apparatus using a scanner comprises a UV light source(10) which radiates UV rays; a scanner(11) which retards the UV rays from the UV light source for a certain time so as to scan to an exposure head by turns; and an exposure head(14) which carries out the exposure by the UV rays entered by turns through the scanner. Preferably the UV light source has a wavelength of 350-410 nm, and is a laser or a mercury lamp. |
申请公布号 |
KR20080075630(A) |
申请公布日期 |
2008.08.19 |
申请号 |
KR20070014789 |
申请日期 |
2007.02.13 |
申请人 |
PROTEC CO., LTD. |
发明人 |
KIM, JOUNG SU;LEE, SOO JIN;KIM, CHANG SHIK;CHOE, HAN SEOP;CHOI, SUNG SOO |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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