发明名称 EXPOSURE APPARATUS USING SCANNER
摘要 An exposure apparatus using a scanner is provided to simplify the exposure apparatus by using only one UV light source, thereby reducing the manufacturing cost. An exposure apparatus using a scanner comprises a UV light source(10) which radiates UV rays; a scanner(11) which retards the UV rays from the UV light source for a certain time so as to scan to an exposure head by turns; and an exposure head(14) which carries out the exposure by the UV rays entered by turns through the scanner. Preferably the UV light source has a wavelength of 350-410 nm, and is a laser or a mercury lamp.
申请公布号 KR20080075630(A) 申请公布日期 2008.08.19
申请号 KR20070014789 申请日期 2007.02.13
申请人 PROTEC CO., LTD. 发明人 KIM, JOUNG SU;LEE, SOO JIN;KIM, CHANG SHIK;CHOE, HAN SEOP;CHOI, SUNG SOO
分类号 G03F7/20 主分类号 G03F7/20
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