AUTOMATED OPTICAL INSPECTION SYSTEM

摘要

An automated optical inspection system is provided to shorten a tact time by using an interpolation processing calculation method for predicting displacement. A revolver(53) supports a plurality of objective lenses and selects one of the objective lenses to use the selected object lens as an inspecting lens. A photographing unit(51) photographs images obtained through the selected object lens. A displacement sensor moving unit(13) moves a displacement sensor(12) between the selected object lens and a target work. A memory unit(81) memorizes an optimum focus displacement of the selected object lens as a reference displacement with respect to a reference position on the target work. A vertical driving unit(6) moves vertically the revolver to define the selected object lens as the optimum focus displacement on the basis of the displacement to the target work and the reference displacement memorized in the memory unit.