发明名称 Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor
摘要 A vibrating gyro element includes in the same plane a base portion; a pair of vibrating arms for detection extended out of the base portion on both sides in a straight line shape; a pair of connecting arms extended-out from the base portion onto both sides in directions perpendicular to the vibrating arms for detection; a pair of vibrating arms for driving each extended-out from the tip portion of each of the connecting arms to both sides perpendicularly to this tip portion; two pairs of beams extended out of the base portion along the respective arms for detection; and a pair of support portions to which the respective beams extended out in the same direction are connected; wherein the support portion is arranged outside the vibrating arm for detection between the vibrating arms for driving in the extending-out direction of each of the vibrating arms for detection.
申请公布号 US7412885(B2) 申请公布日期 2008.08.19
申请号 US20060329691 申请日期 2006.01.10
申请人 SEIKO EPSON CORPORATION 发明人 OGURA SEIICHIRO
分类号 G01P9/04;H02K37/16;G01C19/56;H01L41/08 主分类号 G01P9/04
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