发明名称 |
Vibrating gyro element, support structure of vibrating gyro element, and gyro sensor |
摘要 |
A vibrating gyro element includes in the same plane a base portion; a pair of vibrating arms for detection extended out of the base portion on both sides in a straight line shape; a pair of connecting arms extended-out from the base portion onto both sides in directions perpendicular to the vibrating arms for detection; a pair of vibrating arms for driving each extended-out from the tip portion of each of the connecting arms to both sides perpendicularly to this tip portion; two pairs of beams extended out of the base portion along the respective arms for detection; and a pair of support portions to which the respective beams extended out in the same direction are connected; wherein the support portion is arranged outside the vibrating arm for detection between the vibrating arms for driving in the extending-out direction of each of the vibrating arms for detection.
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申请公布号 |
US7412885(B2) |
申请公布日期 |
2008.08.19 |
申请号 |
US20060329691 |
申请日期 |
2006.01.10 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
OGURA SEIICHIRO |
分类号 |
G01P9/04;H02K37/16;G01C19/56;H01L41/08 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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