发明名称 |
Energy and media connection for a coating installation comprising several chambers |
摘要 |
The invention relates to an energy and media connection module for coating installations. Said module serves for supplying with cooling water, compressed air, process gases, signal, control and cathode power. It can be moved from one coating chamber to another coating chamber along a coating line by a single person in a short time. Further, it is possible to separate the energy connection module from a coating chamber for maintenance or displacement purposes without mechanically demounting all connections.
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申请公布号 |
US7413639(B2) |
申请公布日期 |
2008.08.19 |
申请号 |
US20040855874 |
申请日期 |
2004.05.26 |
申请人 |
APPLIED MATERIALS GMBH & CO. KG |
发明人 |
HATTENDORF GUIDO;ROEDLING GERT;RIST GERHARD |
分类号 |
C03C21/00;C23C14/35;C23C14/34;C23C14/56;C23C16/00;F04B27/02;F16K11/02;H01J37/32;H01J37/34;H01L51/40 |
主分类号 |
C03C21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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