| 摘要 |
A tray transfer apparatus is provided to prevent an erroneous operation by holding stably a tray without causing an error. A tray holding unit includes a main body part(210), an elevation part(220), a rotation part(230), and a driving part. A tray(101) is loaded on an upper surface of the main body part. A plurality of semiconductor devices are loaded on the tray. The elevation part is installed at one end of the main body part. The elevation part is elevated vertically to the main body part, to support one end of the tray. The rotation part is installed at the other end of the main body part. The rotation part pushes the other end of the tray to the elevation unit to hold the tray when the elevation unit supports one end of the tray. The driving part causes the vertical motion of the elevation part and the rotational motion of the rotation part.
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