发明名称 Signal detection contactor and signal calibration system
摘要 A signal detection contactor has a contactor main body and a plurality of coaxial bodies. Each coaxial body includes a core wire. The core wire is used for coming into contact with a probe of a prober and for receiving a signal transmitted from a tester, in order to calibrate a phase difference among signals transmitted through a plurality of probes.
申请公布号 US7414390(B2) 申请公布日期 2008.08.19
申请号 US20050227324 申请日期 2005.09.16
申请人 TOKYO ELECTRON LIMITED 发明人 WATANABE CHIHIRO
分类号 G01R1/06;G01R31/28;G01R1/04;G01R1/067;G01R35/00;H01L21/66 主分类号 G01R1/06
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