发明名称 |
Crystallization apparatus, crystallization method, and phase shifter |
摘要 |
A crystallization apparatus includes an illumination system which applies illumination light for crystallization to a non-single-crystal semiconductor film, and a phase shifter which includes first and second regions disposed to form a straight boundary and transmitting the illumination light from the illumination system by a first phase retardation therebetween, and phase-modulates the illumination light to provide a light intensity distribution having an inverse peak pattern that light intensity falls in a zone of the non-single-crystal semiconductor film containing an axis corresponding to the boundary. The phase shifter further includes a small region which extends into at least one of the first and second regions from the boundary and transmits the illumination light by a second phase retardation with respect to the at least one of the first and second regions. |
申请公布号 |
US7413608(B2) |
申请公布日期 |
2008.08.19 |
申请号 |
US20050224014 |
申请日期 |
2005.09.13 |
申请人 |
ADVANCED LCD TECHNOLOGIES DEVELOPMENT CENTER CO.,LTD. |
发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO;YAMAGUCHI HIROTAKA;NISHITANI MIKIHIKO;TSUJIKAWA SUSUMU;KIMURA YOSHINOBU;JYUMONJI MASAYUKI |
分类号 |
C30B25/12;G03F1/08;B23K26/06;B23K26/073;C30B25/14;G03F1/26;G03F1/68;G03F7/20;H01L21/20;H01L21/268;H01L21/336;H01L29/786 |
主分类号 |
C30B25/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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