| 摘要 |
A press apparatus is provided to reduce a manufacturing fault of a bonded substrate. A treatment chamber(71) is divided into an upper first vessel(71a) and a lower second vessel(71b). Within the treatment chamber, first or second support plate(72a,72b) is installed to respectively support the first or second substrate(W1,W2). The first support plate is connected to a first moving tool installed in the outside of the treatment chamber as interposing plural supports passing through the treatment chamber. The second support plate is connected to a second moving tool moving horizontally together with the second vessel, and integrally moves together with the first vessel. |
