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发明名称
环形夹具及背侧气冷静电夹头
摘要
本发明提供用于夹持工件之静电夹具(ESC)、系统及方法。ESC之夹具板具有盘碟及围绕盘碟之环状物,其中,盘碟自环状物以一间隙距离凹入,藉此界定一容积。背侧气体传递孔经定位为最接近环状物与盘碟之间的界面。至环状物之第一电极的第一电压将工件之周边区域夹持至第一层。至盘碟之第二电极的第二电压大致上补偿容积内之背侧气体的压力。ESC可由J-R或库仑型材料形成。与夹具板相关联之冷却板进一步提供藉由一或多个冷却通道而进行之冷却,该或该等通道构形成构形经由其导引冷却流体。
申请公布号
TW200834803
申请公布日期
2008.08.16
申请号
TW096146028
申请日期
2007.12.04
申请人
艾克塞利斯科技公司
发明人
陶天照;马文 拉方腾;威廉D. 李;艾许温 普罗西特
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
桂齐恒;阎启泰
主权项
地址
美国
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