发明名称 |
VERFAHREN ZUR ERZEUGUNG OPTISCHER BILDER, VORRICHTUNG ZUM AUSFÜHREN DES VERFAHRENS UND PROZESS ZUR HERSTELLUNG EINES BAUELEMENTS UNTER VERWENDUNG DES VERFAHRENS |
摘要 |
An optical image is formed in a resist layer ( 5 ) by a number of subilluminations, in each of which an array of light valves ( 21 25 ) and a corresponding array ( 40 ) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer ( 5 ) is displaced relative to the arrays ( 21 25, 40 ) The scale of the optical image in the resist layer ( 5 ) is measured and this scale is compared with the scale of the image required to be written If there is a difference, the spacing between the light converging elements ( 43 ) is physically altered to adjust the substrate scale. |
申请公布号 |
AT404907(T) |
申请公布日期 |
2008.08.15 |
申请号 |
AT20040769800T |
申请日期 |
2004.08.10 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
VAN DE RIJDT, JOHANNES;TIMMERMANS, ROGER |
分类号 |
G03F7/20;G03F1/14;G03G15/32 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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