VERFAHREN ZUM BEHANDELN VON POLYKRISTALL- BLEISELENID-INFRAROTDETEKTOREN

摘要

Method to process polycrystalline lead selenide infrared detectors consisting in: 1) Substrate preparation; 2) Metal deposition; 3) Metal delineation; 4) Sensor delineation; 5) PbSe deposition by thermal evaporation in vacuum; 6) Specific thermal treatment for sensitizing the active material; 7) Deposition of a pasivating layer on the active material. The method is superior to other techniques because permits to process single element detectors, multielement detectors with different geometries such as: linear arrays, 2-dimensional arrays, detectors on interference filters, multicolor arrays and devices monolithically integrated with a ROIC. Applications include low cost infrared detectors for process control, gas analysis, defense, temperature measurement etc.