| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a clamping device capable of receiving large force also with respect to a tensile direction by a workpiece carrier. <P>SOLUTION: In this clamping device, a clamping mechanism is provided for fixing the workpiece carrier 22 to a chuck 1, the clamping mechanism has a number of clamping elements, these clamping elements are configured as slider elements 10, front portions 12 having push-pressing surfaces 13 are provided to the slider elements 10, and the whole surfaces of the push-pressing surfaces 13 are brought in contact with the clamping surface 28a of the workpiece carrier 22. The clamping surface 28a extends along the outer surface 26 of the workpiece carrier 22. When clamping and fixing the workpiece carrier, the slider elements 10 are brought in contact with the clamping surface 28a. The workpiece carrier 22 is stored in the opening 4 in the center of the chuck 1, and the slider elements 10 are slid in a direction orthogonal to the longitudinal axis L of the opening 4. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
