| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic laminated substrate, capable of manufacturing a ceramic laminated substrate having high density and high face-position accuracy of the surface of the ceramic laminated substrate by restraining and burning it at a low burning temperature. SOLUTION: The method of manufacturing the ceramic laminated substrate 7 has: a step of forming a plurality of dielectric green sheets 1 containing ceramics; a step of disposing dielectrics 2 on the surface of each of the dielectric green sheets 1; a step of forming a laminate 3 by laminating the dielectric green sheets 1 and disposing a ceramic restraining layer 4 not burned at the burning temperature of the laminate 3 on both surfaces of the laminate 3 to form a composite 5; a step of starting the burning (first burning) of the composite 5 and completing the first burning before the laminate 3 is completely densified to form the laminate 3 in the composite 5 into a pre-densified laminate 6; a step of removing the ceramic restraining layer 4 from the composite 5; and a step of burning the pre-densified laminate 6 which is obtained at a temperature not more than the first burning temperature, and completing the densifying step of the pre-densified laminate 6. COPYRIGHT: (C)2008,JPO&INPIT |
