| 摘要 |
PROBLEM TO BE SOLVED: To increase the number of signal transmission paths without changing dimensions of a probe card. SOLUTION: A tester comprises: a test head body 130 for transmitting and receiving signals between a device 200 to be tested; a prober 110 for placing the device 200 to be tested; and the probe card 300 provided between the test head body 130 and the prober 110. The probe card 300 comprises: a plurality of probe pins 320 provided on a plane facing the prober 110, and electrically connected to terminals in the device 200 to be tested; a plurality of test head side pads 330 provided on a plane facing the test head body 130, electrically connected to spring pins 129 on the side of the test head body 130, and also electrically connected to the probe pins 320; and a plurality of prober side pads 340 provided on a plane facing the prober 110, and electrically connected to the probe pins 320. COPYRIGHT: (C)2008,JPO&INPIT |
