摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustic wave apparatus in which an electrode for generating an acoustic wave can be easily and satisfactorily sealed in a wafer level. <P>SOLUTION: The acoustic wave apparatus is provided with: a substrate; an acoustic wave resonator formed on the substrate; a sealing member formed on the substrate and equipped with a storage space where the acoustic wave resonator is stored; and input/output electrode for inputting/outputting the electric signal from the acoustic wave resonator to the outside of the storage space. The sealing member is provided with an inside first sealing member composed of resin materials; an outside second sealing member composed of a radio material film; and intermediate layer formed between the first sealing member and the second sealing member, and having an elastic modulus between that of the radio material film and that of the resin material. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |