发明名称 Verfahren zur Herstellung einer haftfähigen Schicht auf einem Halbleiterkörper
摘要 The method involves clearing away a thin layer near the surface within the range of the surface (101) of the semiconductor body (100), which is coated, by sputtering. A layer is applied on the latter surface, within which the layer near the surface was cleared away. The layer is an amorphous carbon layer or an amorphous semiconductor layer.
申请公布号 DE102006007093(B4) 申请公布日期 2008.08.14
申请号 DE20061007093 申请日期 2006.02.15
申请人 INFINEON TECHNOLOGIES AG 发明人 SCHULZE, HANS-JOACHIM;BARTHELMESS, REINER;PIKORZ, DIRK
分类号 H01L21/56;H01L23/28;H01L29/739;H01L29/78 主分类号 H01L21/56
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