发明名称 |
Verfahren zur Herstellung einer haftfähigen Schicht auf einem Halbleiterkörper |
摘要 |
The method involves clearing away a thin layer near the surface within the range of the surface (101) of the semiconductor body (100), which is coated, by sputtering. A layer is applied on the latter surface, within which the layer near the surface was cleared away. The layer is an amorphous carbon layer or an amorphous semiconductor layer. |
申请公布号 |
DE102006007093(B4) |
申请公布日期 |
2008.08.14 |
申请号 |
DE20061007093 |
申请日期 |
2006.02.15 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
SCHULZE, HANS-JOACHIM;BARTHELMESS, REINER;PIKORZ, DIRK |
分类号 |
H01L21/56;H01L23/28;H01L29/739;H01L29/78 |
主分类号 |
H01L21/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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