| 摘要 |
PROBLEM TO BE SOLVED: To provide a CMOS image sensor for preventing attenuation of light reaching a photo diode region and improving a drop in sensitivity due to a variation in thickness of a passivation film. SOLUTION: A surface layer of the passivation film is etched back together with SOG or a resist on the passivation film on the photo diode region after coating the SOG or resist, thereby eliminating unevenness on the surface of the passivation film and optically flattening. COPYRIGHT: (C)2008,JPO&INPIT
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