| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact inspection apparatus having a function of accurately controlling the terminal voltage without being affected by contact resistance and monitoring the contact state between a force contact pin and a terminal. SOLUTION: This contact inspection apparatus for inspecting the contact state between a terminal to be inspected and the contact pin includes a contact pin means consisting of at least one pair of sense contact pin 4n and force contact pin 3n that are arranged closely and come into contact with the terminal simultaneously, a voltage output/current measurement circuit 5n that controls the voltage of the force contact pin 3n so that the voltage of the terminal measured via the sense contact pin 4n is equal to a predetermined set voltage and measures the current flowing in the force contact pin 3n, and a contact inspecting means 200 for inspecting the contact state between the force contact pin 3n and the terminal based on the potential difference between the sense contact pin 4n and the force contact pin 3n. COPYRIGHT: (C)2008,JPO&INPIT
|
