摘要 |
A device ( 10 ) for shear testing of very small protrusions of an electrical semi-conductor device includes a sensor ( 30 ) for detecting surface contact of a shear test tool ( 15 ). The lateral shear force transducer is also used to detect scrubbing forces as the tool is reciprocated on the substrate, so as to give accurate surface contact sensing of non-rigid substrates. After contact sensing, the test tool is stepped back to ensure the shear test is performed without dragging of the tool on the substrate.
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