发明名称 LIGHT SENSITIVE COMPONENT FOR USE IN PHOTORESISTS
摘要 <p>A compound of the formula (I) where the symbols and indices are each defined as follows: A is A', R or O-R; where R is a straight-chain, branched or cyclic, saturated or unsaturated aliphatic radical having 1-8 carbon atoms; A' is the same or different and is (Formula Ia), B is a bond,-O-C(O)-,-C(O)-O-,-O-C(O)-,-C(O)-NH-,-NH-C(O)-,-C(O)-O-CH2-CH(OH)-CH2-O,-0-CH2-CH(OH)-CH2-O-(O)C-,-0-C(O)-O-,-0-C(O)-NH-or-NH-C(O)-O-; R1 is H or OH; m is 1, 2, 3, 4 or 5; Y is Formulae (II), (III), (IV), (V), n is a positive rational number >= 3; E is the same or different and is-CH-CHR2-,-CHR2-CH2-,-CH2-CHR2-O-,-O-CHR2-CH2-,-(CH2)t-O-or-0-(CH2)-; R2 is H or CH3 and r is 1 or 4, is suitable as a light-sensitive component for photoresists.</p>
申请公布号 KR20080075100(A) 申请公布日期 2008.08.14
申请号 KR20087010507 申请日期 2008.04.30
申请人 AZ ELECTRONIC MATERIALS (GERMANY) GMBH 发明人 ZAHN WOLFGANG;GROTTENMULLER RALF;WAGNER DIETER
分类号 G03F7/004;G03F7/027 主分类号 G03F7/004
代理机构 代理人
主权项
地址