发明名称 CONTINUOUS COATING
摘要 Disclosed is an apparatus for coating a strip-shaped substrate that can be moved in a direction of travel X during the coating process. Said apparatus comprises a number of evaporation boats forming an evaporation bench, a device for electrically heating the evaporation boats, and a device for feeding wire that is to be evaporated to the evaporation boats. The number of evaporation boats is formed by a set A and a set B of evaporation boats. The evaporation boats of set A have a length LA ranging from LO - d A to LO + d A while the evaporation boats of set B have a length LB ranging from LO - d B to LO + d B. The number of evaporation boats are arranged in the direction X within an area that extends parallel to the direction Y and has a maximum width of 2 LO + d A + d B. The evaporation boats of set A and set B are alternately disposed next to one another. Furthermore, the evaporation boats of set A are arranged at an angle a ranging from -1° to -89° relative to the direction X while the evaporation boats of set B are arranged at an angle ß ranging from 1° to 89° relative to the direction of travel X. The invention also relates to a method for designing an apparatus used for coating a strip-shaped substrate.
申请公布号 WO2008064894(A3) 申请公布日期 2008.08.14
申请号 WO2007EP10389 申请日期 2007.11.30
申请人 LEYBOLD OPTICS GMBH;STEPHAN, KUEPER 发明人 STEPHAN, KUEPER
分类号 C23C14/56;C23C14/24 主分类号 C23C14/56
代理机构 代理人
主权项
地址