| 摘要 |
PROBLEM TO BE SOLVED: To make constant a tension of a belt mounted to an arm part, and to prevent a substrate holder from rotating around an arm part fore end side mounting point as a fulcrum, by linearly moving a fore end side of the arm part mounted to the substrate holder without applying a load to mounting arms at the same point on the base end side of the arm part of the substrate conveying robot. SOLUTION: This substrate conveying robot includes: an arm part comprising a pair of right and left first arms 5A', 5B' coupled to each shaft of a 2-axis coaxial structure type shaft 26 coupled to a driving part on a base end side, and a pair of right and left second arms 32A, 32B coupled to the base end side via a joint on the fore end sides of the first arms having the same length as the first arms; and a substrate holder 8 mounted to the second arm fore end sides. By rotation of the first and second arms, the substrate holder moves. A rotation prevention means for preventing rotation around the position where the second arm fore ends are mounted is provided between the substrate holder and the arm part. COPYRIGHT: (C)2008,JPO&INPIT
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