| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that a scribing crack grown from a scribing line is not formed in a desired depth, by successively forming a heating region, a cooling region, and a reheating region. <P>SOLUTION: The following steps are successively provided: a first step of irradiating a heating region 3 with heating energy whose strength is controlled, and performing a scan along a planned working line 2b; a second step of irradiating a cooling region 4a, which is positioned behind the heating region 3 in the first step in the relative moving direction, with cold heat energy, performing a scan along the planned working line 2b, and forming a scribing line; and a third step of irradiating a reheating region 5a, which is positioned behind the cooling region 4a in the second step in the relative moving direction, with heating energy whose strength is controlled, and performing a scan along the planned working line 2b. For forming a scribing crack 5b grown from a scribing line with a desired depth, a heating energy amount P per a unit area of the reheating region 5a in the third step is adjusted according to the characteristic formula of the depth of the scribing crack 5b. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
