| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve a phase shift amount measuring apparatus capable of further correctly measuring the phase shift amount of a phase shifter. <P>SOLUTION: A laterally offset interference image of a phase shift mask (3) is formed by a shearing interferometer (6, 44), and the interference image is captured by a two-dimensional imaging device (17, 48). The output signal outputted from each light-receiving element of the two-dimensional imaging device is supplied to a signal processing device (19), and the phase shift amount is calculated for each light-receiving element. Since the light-receiving area of the light-receiving element is very small, the phase shift amount of any light-receiving element outputting a specific phase amount due to the incidence of diffracted light or multiply-reflected light is excluded; and the phase shift amount is determined, based on the phase shift amount found from output signals of the remaining light-receiving elements. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
