| 摘要 |
PROBLEM TO BE SOLVED: To obtain a living thing microscope capable of performing automatic focus operation with simple constitution even in a state where a sample is put in the center of the field of the microscope. SOLUTION: The living thing microscope has a focus error detecting optical system which irradiates a focus reference plane with focus error detecting light through an objective, receives returning light from the focus reference plane and detects a focused state on the focus reference plane. An irradiating position with the focus error detecting light on the focus reference plane is deviated from the center of the field of the microscope. COPYRIGHT: (C)2008,JPO&INPIT |
