发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device includes a gate pattern formed over a semiconductor substrate, the substrate defining a cell region and a peripheral region. First and second contact plugs are formed in the cell region. Third and fourth contact plugs are formed in the peripheral region. A first separation structure is formed in the cell region and covers the first contact plug. A second separation structures are formed in the peripheral region and define first and second openings, the first opening exposing an upper portion of the third contact plug, the second opening exposing an upper portion of the fourth contact plug. First, second, and third metal wire sections are formed over the first, second, third, and fourth contact plugs. The first metal wire section is formed in the cell region and contacts the second contact plug. The second metal wire section is formed in the peripheral region and contacts the third contact plug. The third metal wire section is formed in the peripheral region and contacts the fourth contact plug. The first separation structure electrically isolates the first contact plug from the first metal section.
申请公布号 US2008191283(A1) 申请公布日期 2008.08.14
申请号 US20070856696 申请日期 2007.09.17
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SHIN YONG CHUL
分类号 H01L27/088;H01L21/8234 主分类号 H01L27/088
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