| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce variance of deposition of raw particles on a substrate in a composite structure manufacturing method for manufacturing a composite structure comprising the substrate and a brittle material-formed structure by spraying aerosol containing particles of a brittle material to the substrate to deposit the brittle material-formed structure on the substrate. <P>SOLUTION: In the composite structure manufacturing method, the brittle material-formed structure is manufactured under a condition to satisfy inequality 1 : P1>P2>P3, where P1 denotes a pressure in a space constituted of a nozzle, a substrate and a suction member, P2 denotes a pressure at the connection opening part of a structure forming chamber to a second exhaust mechanism, and P3 denotes the pressure of a connection opening part of the suction member to a first exhaust mechanism. <P>COPYRIGHT: (C)2008,JPO&INPIT |
