| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of measuring a large-sized sample while keeping precision of several ten picometers. SOLUTION: A probe is set to the state fixed to a certain one point to detect the relative vibration between a measuring head and a sample, and the resonance frequency of the relative vibration is calculated from the detection result. Further, the surface profile data of the sample is detected while scanning the probe in parallel to the surface of the sample. By removing the resonance frequency calculated from the shape data, the surface profile of the sample can be measured with high precision. COPYRIGHT: (C)2008,JPO&INPIT
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