发明名称 |
IMPROVED BUBBLER FOR THE TRANSPORTATION OF SUBSTANCES BY A CARRIER GAS |
摘要 |
A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler. |
申请公布号 |
KR20080075186(A) |
申请公布日期 |
2008.08.14 |
申请号 |
KR20087014529 |
申请日期 |
2006.10.12 |
申请人 |
SIGMA-ALDRICH CO. |
发明人 |
CUNNING HUGH;WILLIAMS GRAHAM;ODEDRA RAJESH;KANJOLIA RAVI |
分类号 |
C23C16/448;C23C16/00 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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