| 摘要 |
PROBLEM TO BE SOLVED: To utmost prevent lowering of the product quality and to apply a paste in good condition. SOLUTION: A coating head 6 is movably supported in the horizontal direction by a beamlike member 5a of a gantry type frame 5 arranged over a stage 4 via a guiding device 8. The guiding device 8 has a guide rail 8a1 fixed to the beamlike member 5a and a movable platform 8a2 fixed to the coating head 6 slidably arranged on the guide rail 8a1. A plurality of vacuum suction holes 5b is arranged in a prescribed interval along the guide rail 8a1 in the beamlike member 5a and each of the vacuum suction holes 5b is connected to a vacuum source via piping having a solenoid valve. COPYRIGHT: (C)2008,JPO&INPIT
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