发明名称 |
APPARATUS AND METHOD FOR SCANNING CAPACITANCE MICROSCOPY AND SPECTROSCOPY |
摘要 |
An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described. |
申请公布号 |
WO2008060624(A3) |
申请公布日期 |
2008.08.14 |
申请号 |
WO2007US24091 |
申请日期 |
2007.11.15 |
申请人 |
ASYLUM RESEARCH CORPORATION |
发明人 |
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分类号 |
G01R31/26;G01Q30/04;G01Q40/00;G01Q60/46;G01Q60/48 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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