Objective System for an Optical Scanning Device for Ultraviolet and/or Deep-Ultraviolet Wavelengths

摘要

An objective system ( 1 '') for an optical scanning device for ultraviolet and/or deep-ultraviolet wavelengths is provided. The objective system ( 1 '') comprises at least one glass component ( 3 '') with an aspherical surface. The at least one glass component ( 3 '') is made of a glass material comprising a low softening temperature and a low absorption coefficient for ultraviolet and/or deep-ultraviolet wavelengths.