MEMS APPARATUS FOR MEASURING ACCELERATION IN THREE AXES

摘要

Provided is a triple-axis MEMS acceleration sensor that measures accelerations in directions of first, second, and third axes, which spatially cross each other, using convection of a fluid, the triple-axis MEMS acceleration sensor comprises: a first substrate having four heating points that generate heat, four thermocouples which have thermocouple junction points that contact the heating points respectively, and a first cavity that allows the fluid to pass; a second substrate that is parallel to the first substrate, having a fifth heating point that generates heat, a fifth thermocouple which has a thermocouple junction point that contacts a fifth heating point, and a second cavity that allows the fluid to pass, wherein an acceleration in the direction of one axis out of three axes is measured using a temperature difference between two heating points separated from each other in a direction of the axis.