| 摘要 |
PROBLEM TO BE SOLVED: To provide: a charged particle beam drawing apparatus which accurately draws with a charged particle beam focused at desired positions on a surface of a test piece rotated around an axis in a different direction from a traveling direction of the charged particle beam; and a charged particle beam drawing method using the same. SOLUTION: The charged particle beam drawing apparatus comprises: a charged particle beam source section 1 for generating and irradiating a charged particle beam; a height sensor section 4 for measuring a height of the test piece at a different position from an irradiation position of the charged particle beam; a focus lens section 2 for focusing the charged particle beam at the height of the test piece; a deflector section 3 for deflecting the charged particle beam; and a stage section 5 for holding and moving the test piece. The stage section 5 has a rotating driver section 5A for rotating the test piece around an axis in a direction not parallel to the traveling direction of the charged particle beam and a transmitting beam detector section 5B for detecting transmission of the charged particle beam, the height sensor section 4 controls the focus lens section 2, and the transmitting beam detector section 5B controls the deflector section 3. COPYRIGHT: (C)2008,JPO&INPIT |
