| 摘要 |
PROBLEM TO BE SOLVED: To accurately keep the position of each needle part by suppressing deflection through reduction of the bending moment that relates to a probe base. SOLUTION: The probe unit used to inspect a board to be inspected comprises a probe assembly 34, having a needle part electrically in contact with an electrode of a circuit of the board to be inspected; a support part 33 for supporting the probe assembly; and a probe base 32 for integrally supporting the support part. The support part is provided with a suspension block installed in a tip part of the probe base; a slide block, disposed in the tip part of the suspension block for supporting the probe assembly and that is slidably supported so as to absorb repulsive force, when the needle comes in contact with the electrode; and a load-receiving member, installed in a base end part of the probe base for supporting the slide block and that is extended to the slide block and receives repulsive force by abutting against the slide block. COPYRIGHT: (C)2008,JPO&INPIT
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