Vaporizing Device and Method for Vaporizing Coating Material

摘要

A device for vaporizing coating material is disposed in a vacuum chamber as part of a deposition apparatus; the coating material being arranged in a crucible for vaporization purposes. The vaporizing device has an evaporation chamber that is connected, via a vacuum valve, to a loading chamber which can be evacuated while an evaporator is connected to the evaporation chamber at a vapor discharge end, i.e., the end facing the vacuum chamber, via a first vapor stop valve.