| 摘要 |
<p>A microsystem (1), using MEMS (MicroElectroMechanical Systems) or micro-TAS (micro Total Analysis Systems) technology for separating mixtures of non-miscible fluids (5, 6) such as liquids and gases, has at least one detector (2a, 2b) to inspect a zone (7a, 7b) of the mixture, and controls (3, 26) for opening or closing a passage (25) to discharge a detected fluid. The detector can be an ultrasound sensor, based on electrical conductivity, or a thermal, optical or chemical sensor, and it can comprise a series of sensors positioned around a control. The microsystem can be based on a semiconductor such as silicon, or a polymer.</p> |
