Substance manufacturing apparatus and chemical reactors with the apparatus

摘要

The present invention is to detect leakage of fluid from a channel in a microreactor certainly at an early stage. A chemical reactor has a microreactor with a pump for sending first, second solutions, and a channel for mixing and reacting the first, second solutions. The solution sending amount of the first, second solutions to be supplied to the microreactor is controlled by a pump controlling device. The microreactor has a first substrate with a channel and a second substrate to be bonded airtightly with the first substrate. A leak detecting channel is formed in the vicinity of the channel in the first substrate.