SEMICONDUCTOR WAFER TRANSFER ROBOT

摘要

A semiconductor wafer transfer robot is provided to reduce a volume of a transfer chamber and to secure easily an installation space by driving independently upper and lower transfer robots. A first transfer robot(500) is installed at an upper part of a frame(700) positioned in a center part of a transfer chamber. A second transfer robot(600) is installed at a lower part of the frame to face the first transfer robot. The first transfer robot includes a first main rotary shaft(501) rotated by a first rotary motor, at least two or more first arm parts(502) connected to a lower side of the first main rotary shaft, and a pair of first blades(504) installed at one of the first arm parts. The second transfer robot includes a second main rotary shaft(601) rotated by a second rotary motor, at least two or more second arm parts(602) connected to a lower side of the second main rotary shaft, and a pair of second blades(604) installed at one of the second arm parts. The pair of first blades are positioned on a first plane. The pair of second blades are positioned on a second plane. The first and second planes are different from each other.