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发明名称
SPUTTERING TARGET
摘要
申请公布号
EP1876258(A4)
申请公布日期
2008.08.13
申请号
EP20060730171
申请日期
2006.03.28
申请人
NIPPON MINING & METALS CO., LTD.
发明人
MIYASHITA, HIROHITO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
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地址
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