METHOD AND APPARATUS FOR PREVENTING EDGE DEPOSITION,申请号KR20000051588-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PREVENTING EDGE DEPOSITION
摘要
申请公布号	KR100852098(B1)	申请公布日期	2008.08.13
申请号	KR20000051588	申请日期	2000.09.01
申请人		发明人
分类号	C23C16/458;H01L21/205;H01L21/683;H01L21/687	主分类号	C23C16/458
代理机构		代理人
主权项
地址

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